Advanced Moiré Methods with High Resolution Scanning Microscopy and their Application

Some novel micro/nano-moiré methods have been developed at the Failure Mechanics Lab in Tsinghua University. This paper offers an introduction of these new methods, which can be realized under focus ion beam (FIB) system,scanning electron microscope (SEM), atomic force microscope (AFM), scanning tunneling microscope(STM) as well as laser scanning confocal microscope (LSCM). These micro/nano-moiré methods are able to provide quantitative analysis to micro/nano-deformation of the sample. The measurement principles and experimental techniques of these methods are described in detail. Some applications of these methods are given. The successful experimental results demonstrate the feasibility of these methods and also verify that these methods can realize high sensitivity displacement measurement with mico/nano-meter spatial resolution, and their wide applications in micro/nano-mechanics researches are expected.